Ultra High Resolution FE-SEM

Field Emission Scanning Electron Microscope (FE-SEM)

Hitachi SU8010

With its unique SE-BSE filtering modes equipped with Oxford Ultim Max Infinity 40 EDX, FE-SEM stationed at NAP provides ultra-high resolution imaging with elemental analysis and mapping. The Hitachi SU8010 also allows elimination of charging effects with low voltage imaging. It can achieve imaging resolution of 1.3nm at 1.0kV or 1.0nm at 15kV.

Furthermore, the deceleration mode enables the ultra-low accelerating voltage for shallow surface observation (0.1kV). Nonetheless, specimens for FE-SEM analysis should be dry solid with stability in vacuum condition under high-voltage electron beam.

The equipped STEM detector offers great opportunity to acquire TEM comparable images through detection of the transmitted and scattered electrons. As for STEM analysis, the sample has to be ultrathin (~ 100nm thick) to allow transmission of the electrons. The transmitted electrons provide information on the density and crystalline state of the sample whereas the scattered electrons deliver information on its compositional distribution.

Oxford Ultim Max Infinity 40 EDX system, integrated with our Hitachi SU8010 Field Emission Scanning Electron Microscope (FESEM). This advanced energy-dispersive X-ray (EDX) detector delivers ultra-fast, high-resolution elemental analysis, enabling precise compositional mapping down to the nanoscale. Ultim Max Infinity 40 operating with the AZtec software suite with AZtecLive allowing LIVE TV-mode X-ray elemental maps auto labelling peak spectrum.

Charges

Led by our skilled technical officers, we offer analysis services for external users. We also extend our services to train users undertaking long term or intensive projects which require many hours of analysis time. Our competitive rates are based on the type of analysis and number/type of samples.

Note:

  1. For internal users, please contact the respective technical officer.
  2. Prices may be subject to change. For exact quotations, please contact the respective technical officer.
  3. 8% SST will be included in the official quotation.
Service typeUnit of
Measurement
AcademicCorporate/Industry
FE-SEM Imagingper sample320400
FE-SEM Cross Sectional Imagingper sample400400
FE-SEM + EDX analysisper sample450500

Booking

To request an official quotation, please fill up the form here.

Please allow a lead time at least 3 days to review the submission.

Contact

For any further inquiries and booking, please contact the respective persons below:

 

ChM. Ts. Afiq bin Anwar (Senior Technical Officer)

Email: afiq.anwar@monash.edu

Tel: (+603) 55145649

Location

Level 1, Building 5,
Monash University Malaysia
Jalan Lagoon Selatan
47500 Bandar Sunway
(Location map)